Rapid Thermal Vacuum Process Oven RTP-200

Brand：德國UNITEMP
Implantation/Contact Annealing, RTP, RTA, RTO, RTN, Operation with inert gases, Oxygen, Hydrogen, Forming gas, SiAu, SiAl, SiMo Alloying, Low-k dielectrica, Crystallization & densification
Precise ramp up and fast ramp down rates
Excellent temperature uniformity
Up to 4 gas lines (Mass Flow Controller)
Integrated data logging
SIMATIC^®controller
Heated by Infrared Lamps
50 programs with 50 steps each
Small foot print

Specification

Model	RTP-200
Max. part size	200 mm dia. or 182 mm x 182 mm
Chamber size	230 × 400 × 40 mm
Vacuum Capability	10^-3 hPa（可選10^-6 hPa）
Max. Temperature	1000°C
Temp. uniformity	≤ ± 1 % of set temperature
Heating	Top and bottom heating with 24 IR Lamps (21 kW)
Ramp up rate	Up to 75 K/sec
Ramp down rate	T= 1000 °C > 400 °C：200 K/min，T= 400 °C > 100 °C：30 K/min
Flow Controller	Mass Flow Controller (Nitrogen 5 nlm)
Chamber Cooling	50 programs with 50 steps each
Substrate Cooling	Water cooled
Electrical connection	By Nitrogen Gas
Dimension	3 × 400/230 V，21 kW
Weight	575 × 640 × 570 mm

Item	Description
RTP-EP	Extended power with ramp rate better 100K/sec (power x 2)
RTP-HT	Extended temperature up to 1200 °C
RTP-MFC	Additional process gas line with Mass Flow Controller (max. 3 add)* * = all in all max. 4 process gas lines
FG-O2	Forming gas – oxygen safety unit
RTP-Ox	Various oxygen analyser with different tolerances against H traces
RTP-MM	Moisture Analyzer to measure moisture residues in the chamber
RTP-SW-VP / CH	Switchbox for chiller and/or vacuum pump
TC I / TC II	add. Thermocouple to measure on device (plugged in chamber, max. 1)
VAC I	Basic Vacuum up to 3 hPa, Vacuum sensor, vacuum valve excl. pump (not for -HV)
VAC II	Comfort Vacuum up to 10^-3hPa, Pirani Sensor, vacuum valve, excl. pump (not for HV)
VCR	Tubing made of VCR (welded)
RTP-GP-200	Graphite Plate or susceptor (optional SiC coated)
RTP-PC-200	add. 200 mm oven chamber = double chamber (for usage of 2 chambers)
RTP-QF-200-200mm	Quartz frame for 200 mm wafer
RTP-QF-200-150mm	Quartz frame for 150 mm wafer
RTP-QF-200-100mm	Quartz frame for 100 mm wafer