Specification
| HM系列 適用於AMAT設備 |  |  | ||||
| Dimension | Model | Specification | Dimension | Model | Specification | |
| 12inch | HM7031318WS | 70*318 | 8inch | HM7031216WS | 70*216 | |
| HE系列 適用於EBARA設備 |  |  | ||||
| Dimension | Model | Specification | Dimension | Model | Specification | |
| 12inch | HE60310 | 60*310 | 12inch | HE3818310 | 38*310 | |
| HD系列 適用於DISCO設備 |  |  | ||||
| Dimension | Model | Specification | Dimension | Model | Specification | |
| 12inch | HD3818310 | 38*310 | 6inch | HD3818168 | 38*168 | |