Specification
| Model | MS-1 |
| Loading area | for wafer size up to 8" or substrate size 200 x 200 mm |
| X/Y adjustment | by micrometer screw and X-Y table |
| Vision-alignment System | camera with 5 Megapixel |
| Vacuum | with integrated vacuum pump and chuck |
| Dimension | 400 × 500 × 352 mm |
| Weight | 25 kg |




