Specification
| Weight | 35kg |
| Dimension | 460mm(長)× 505mm(寬)× 205mm(高) |
| 接口 | 以太網口× 1 DB9×1 電源線接口×1 腳踏開關×1 氣源口×1 開關按鈕× 1 |
| 方片:125mm x 125mm, 156mm x 156mm 圓片(寸):4”,5“,6”,8”,12“ | |
| 硅片要求 | 硅片厚度範圍:50um~1000um |
| 硅片電阻率範圍:0.1Ω*cm~20Ω*cm(電阻率範圍可定制)(厚度約180um) |
| 數具指標 | |
| 單點及多點厚度 | 誤差≤士3.00μm |
| 重複性≤士0.5μm | |
| Resistivity | 誤差≤士3% |
| 重複性≤0.5% | |
| Environmental Requirements | |
| Temperature | 22°C~25°C |
| Relative Humidity | 35% ~60% |
