真空密封機 2Z-HVS-200
FortuneTell ▶ Products ▶ Assembly & Test & Pack ▶ 半導體/零件編帶/包裝/測試設備 ▶ High Vacuum Sealer with 2 Heating Zones 2Z-HVS-200

High Vacuum Sealer with 2 Heating Zones 2Z-HVS-200

SKU: 2Z-HVS-200 Category: Tags: ,
  • Brand：德國UNITEMP
  • Application: Sealing and thermic encapsulation of MEMS (Micro-Electro-Mechanical Systems), Getter activation (Deposition of reactive material that is placed inside a vacuum system), Component separation during thermal processing in 2 temperature zones
  • Up to 4 internal gas lines
  • Data logging
  • Double stage rotary vane pump for vacuum up to 10-6 hPa。
  • SIMATIC®controller
  • Optical process control by 360 °C

Specification

Model2Z-HVS-200
Heating Area200 mm diameter
AdapterMax. 6 pcs
Substrate SizeMax. 42 mm dia.
Vacuum Capability10-6 hPa（包含泵）
Max. Temperature頂部450°C，底部200°C
Ramp up rate20 K /min（真空中）
Ramp down rate20 K /min（真空中）
DimensionW805 × D500 × H820 mm
Weight105 kg（包含泵）
Voltage230/400 V AC, 3P, +N, 50-60 Hz, max. 3 × 16 A, 9 kW

Video

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