Specification
| Model | 2Z-HVS-100 |
| Heating Area | 100 mm diameter |
| Adapter | Max. 6 pcs |
| Substrate Size | Max. 16 mm dia. |
| Vacuum Capability | 10-6 hPa(包含泵) |
| Max. Temperature | 頂部450°C,底部200°C |
| Ramp up rate | 20 K /min(真空中) |
| Ramp down rate | 20 K /min(真空中) |
| Dimension | W200 × D500 × H470 mm |
| Weight | 24 kg(包含泵) |
| Voltage | 230 V AC, 1P, 50-60 Hz, max. 16 A, 3.2 kW |




