Specification
規格參數
| Item | C300 | H300 | T300 | M300 | T200HV |
| 適用場合 | 通用機型 | 通用機型 | 適用於三溫 | 適用於存儲 | 適用於三代半 |
| 適用的晶圓尺寸 | 12吋/8吋 | 12吋/8吋 | 12吋/8吋 | 12吋/8吋 | 8吋/6吋 5吋/4吋 |
| 適用的晶圓厚度 | 200~2200µm | 200~2200µm | 200~2200µm | 200~2200µm | 200~2200µm |
| 綜合精度 | XY軸±1µm ZF軸±2µm | XY軸±1µm ZF軸±2µm | XY軸±1µm ZF軸±2µm | XY軸±1µm ZF軸±2µm | XY軸±3µm ZF軸±3µm |
| Index time | 240ms (X/Y:10mm, Z:0.5mm) | 240ms (X/Y:10mm, Z:0.5mm) | 240ms (X/Y:10mm, Z:0.5mm) | 240ms (X/Y:10mm, Z:0.5mm) | 250ms (X/Y:10mm, Z:0.5mm) |
| 針測壓力 | 200kgf | 200kgf | 200kgf | 750kgf | 150kgf |
| 測試溫度 | 常溫 | 常溫~150℃±1℃ | -40~200℃±1℃ | 常溫~150℃±1℃ | -40~200℃±1℃ |
| 測試機對接方式 | Cable, Hard Docking, Direct Docking | Cable, Hard Docking, Direct Docking | Cable, Hard Docking, Direct Docking | Cable, Hard Docking, Direct Docking | Hinge, Auto-leveling |
| 通訊接口 | GPIB, RS232 | GPIB, RS232 | GPIB, RS232 | GPIB, RS232 | GPIB, RS232 |
| 設備尺寸 | 1750mm(L)×1690mm(W)×1460mm(H) | 1750mm(L)×1690mm(W)×1460mm(H) | 1710mm(L)×1890mm(W)×1500mm(H) | 2000mm(L)×1890mm(W)×1500mm(H) | 1125mm(L)×1160mm(W)×1100mm(H) |
| Weight | 2000kg | 2000kg | 2000kg | 2200kg | 1200kg |
| 電力要求 | 220VAC 4.5KVA | 220VAC 4.5KVA | 220VAC 4.5KVA | 220VAC 4.5KVA | 220VAC 4.5KVA |
| 壓縮空氣壓力 | 0.6~0.99MPa | 0.6~0.99MPa | 0.6~0.99MPa | 0.6~0.99MPa | 0.6~0.99MPa |
| Vacuum Pressure | -90~-60kPa | -90~-60kPa | -90~-60kPa | -90~-60kPa | -90~-60kPa |
