| 型號 | VPO-300 |
| 腔室 | 裝載區域：300 × 300 mm 或 12”晶圓 箱體尺寸：350 × 350 × 50 mm（可選：箱體高度120 mm） 箱壁：鋁拋光，易於清潔（可選：不鏽鋼） |
| 真空度 | 10-3 hPa（可選：10-6 hPa） |
| 溫度 | 高達1000°C |
| 溫度均勻性 | 設定溫度的1 %（在200 mm的晶圓上） |
| 加熱 | 底部加熱：紅外燈18 kW 頂部加熱：紅外燈18 kW |
| 上升速率 | 40 K/sec |
| 下降速率 | T = 1000°C > 400°C：200 K/min，T = 400°C > 100°C：30 /min |
| 使用氣體 | 1條帶質量流量控制器的氣體管線（5 nlm=升/分鐘） （可選：最多添加3條氣體管線） |
| 程序控制 | 50個程序，每個程序有50個編程 |
| 基板冷卻 | 氮氣 |
| 電壓功率 | 2 ×（400 / 230V，18 kW） |
| 尺寸 | W540 × D690 × H890 mm |
| 重量 | 140 kg |
| 項目 | 說明 |
| VPO-CAB-UHE | Floor model with cabinet and integrated Universal Heat Exchanger (UHE) |
| VPO-MFC | Additional gas line with Mass Flow Controller (max. 3 add. gas lines) |
| VPO-EH | Chamber height 100 mm (instead of 50 mm) with viewing window (85 mm x 25 mm) |
| VPO-HT | Temperature extension up to 1200 °C |
| VPO-SS | Chamber made of stainless steel (VA 1.4305) polished, instead of aluminum 50 mm |
| VPO-GP | Graphite Plate or Susceptor 3 mm thick |
| VPO-LP | Lift pins for raising a single wafer |
| VPO-TC | Additional thermocouple to measure on device (plugged in chamber) (max. 3 pcs) |
| VPO-QP | Quartz glass plate for sealing the top lamp field |
| VPO-OP1 | Overpressure up to 200 mbar, 10-3 hPa up to 0,02 MPa |
| VPO-OP2 | Overpressure up to 2000 mbar, 10-3 hPa bis 0,2 MPa |
| VPO-SI | Serial interface between VPO system and external PC |
| VPO-RC | Remote control of top cover opening and closing (not for VPO-300-HV version) |
| VAC I | Basic Vacuum up to 3 hPa, Vacuum sensor, vacuum valve excl. pump (not for VPO-300-HV version) |
| VAC II | Comfort Vacuum up to 10-3 hPa, Pirani Sensor, vacuum valve, excl. pump |
| Hood L | Protective safety hood for use of 100 % hydrogen (excl. H2 sensor, gas box and flame -off unit) others on request |
